| Referências: |
MADOU, M. J.; Fundamentals of microfabrication, CRC press, Florida, 2002.
MAY, G. S.; SZE, S. M.; Fundamentals of semiconductor fabrication, John Wiley & Sons, New York, 2003.
GARDNER, Julian W.; VARADAN, Vijay K.; AWADELKARIM, Osama O.; Microsensors MEMS and smart devices, John Wiley & Sons ltd, 2001. FRADEN, J.; Handbook of modern sensor physics, designs, and applications, Springer-Verlag, 2004.
WEBSTER, J. G.; The Measurement, instrumentation and sensors handbook, Springer, 1999.
SEDRA, Adel S.; SMITH, Kenneth C.; Microeletrônica, 5 ed. Prentice Hall, 2010.
CAMPBELL, S.A., “The Science and Engineering of Microelectronic Fabrication”, Oxford University Press, 2001;
CAMPBELL, S.A., “Fabrication Engineering at the Micro- and Nanoscale”, Oxford University Press, 2012. |
